Screen LibrarySoft X-ray and EUV imaging systems：3-4 August 2000, San Diego, USA
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| Corporate Authors: | |
|---|---|
| Group Author: | ; |
| Published: |
SPIE,
|
| Publisher Address: | Bellingham, Wash., USA |
| Publication Dates: | c2000. |
| Literature type: | Book |
| Language: | English |
| Series: |
SPIE proceedings series ; v. 4146 |
| Subjects: | |
| Carrier Form: | vii, 178 p.: ill. ; 28 cm. |
| ISBN: | 0819437913 |
| Index Number: | O434 |
| CLC: | O434-532 |
| Call Number: | O434-532/S681/2000 |
| Contents: | Includes bibliographical references and index. |