Screen LibraryReliability, testing, and characterization of MEMS/MOEMS：22-24 October 2001, San Francisco, USA
Saved in:
| Corporate Authors: | ; |
|---|---|
| Group Author: | |
| Published: |
SPIE,
|
| Publisher Address: | Bellingham, Wash., USA |
| Publication Dates: | c2001. |
| Literature type: | Book |
| Language: | English |
| Series: |
SPIE proceedings series ; v. 4558 |
| Subjects: | |
| Carrier Form: | xxvii, 296 p.: ill. ; 28 cm. |
| ISBN: | 0819442860 |
| Index Number: | TM38 |
| CLC: |
TM38-532 TH-39 |
| Call Number: | TH-39/R382/2001 |
| Contents: | Includes bibliographical references and index. |