Handbook of silicon wafer cleaning technology /
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Group Author: | ; |
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Published: |
William Andrew,
|
Publisher Address: | Oxford : |
Publication Dates: | [2018] |
Literature type: | Book |
Language: | English |
Edition: | Third edition. |
Series: |
Materials science & process technology series
|
Subjects: | |
Carrier Form: | xviii, 773 pages : illustrations, forms ; 23 cm. |
Bibliography: | Includes bibliographical references and index. |
ISBN: |
9780323510844 (paperback) : 0323510841 (paperback) 9780323510851 (electronic book) 032351085X (electronic book) |
Index Number: | TK7871 |
CLC: | TN304.1 |
Call Number: | TN304.1/H236/3rd ed. |