Screen LibraryHandbook of silicon wafer cleaning technology /
Saved in:
| Group Author: | ; |
|---|---|
| Published: |
William Andrew,
|
| Publisher Address: | Oxford : |
| Publication Dates: | [2018] |
| Literature type: | Book |
| Language: | English |
| Edition: | Third edition. |
| Series: |
Materials science & process technology series
|
| Subjects: | |
| Carrier Form: | xviii, 773 pages : illustrations, forms ; 23 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: |
9780323510844 (paperback) : 0323510841 (paperback) 9780323510851 (electronic book) 032351085X (electronic book) |
| Index Number: | TK7871 |
| CLC: | TN304.1 |
| Call Number: | TN304.1/H236/3rd ed. |