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ICO20：MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China

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Bibliographic Details
Corporate Authors: United States. Air Force. Office of Scientific Research. Asia Office; Society of Photo-Optical Instrumentation Engineers; International Commission for Optics
Group Author: Zhou Zhaoying; Esashi Masayoshi 1949-
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2006.
Literature type: Book
Language: English
Series: Proceedings of SPIE ; v. 6032
Subjects:
Imaging systems
Optoelectronic devices
Nanostructured materials
Nanotechnology
Microelectromechanical systems
Carrier Form: 1 v. (various pagings): ill. ; 28 cm.
ISBN: 081946063X
Index Number: TN15
CLC: TN15
TM38-532
Call Number: TM38-532/I612/2005
Contents: Includes bibliographical references and author index.

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