ICO20:MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China
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Corporate Authors: | ; ; |
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Group Author: | ; |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | c2006. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE ; v. 6032 |
Subjects: | |
Carrier Form: | 1 v. (various pagings): ill. ; 28 cm. |
ISBN: | 081946063X |
Index Number: | TN15 |
CLC: |
TN15 TM38-532 |
Call Number: | TM38-532/I612/2005 |
Contents: | Includes bibliographical references and author index. |