Screen LibraryNanofabrication：techniques and principles
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| Corporate Authors: | |
|---|---|
| Group Author: | ; ; |
| Published: |
SpringerWienNewYork,
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| Publisher Address: | Vienna |
| Publication Dates: | c2012. |
| Literature type: | Book |
| Language: | English |
| Subjects: | |
| Online Access: |
http://dx.doi.org/10.1007/978-3-7091-0424-8 |
| Carrier Form: | 1 online resource (viii, 344 p.): |
| ISBN: |
9783709104248 (electronic bk.) 3709104246 (electronic bk.) |
| Index Number: | TB383 |
| CLC: | TB383 |
| Contents: |
Includes bibliographical references. Pt. 1. Introduction -- pt. 2. Nanolithography -- pt. 3. Deposition at the nanoscale -- pt. 4. Nanoscale etching and patterning. |