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ULSI process integration 5

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Bibliographic Details
Corporate Authors: International Symposium on ULSI Process Integration (5th 2007 Washington, DC; Electrochemical Society. Meeting 2007 Washington, DC); Electrochemical Society. Electronics and Photonics Division
Group Author: Claeys Cor L
Published: Electrochemical Society,
Publisher Address: Pennington, NJ
Publication Dates: c2007.
Literature type: Book
Language: English
Series: ECS transactions ; vol. 11, no. 6
Subjects:
Integrated circuits > Ultra large scale integration
Carrier Form: ix,495 p.: ill. ; 23 cm.
ISBN: 9781566775724
1566775728
Index Number: TN47
CLC: TN47-532
Call Number: TN47-532/I617-2/2007
Contents: "Presented at the Fifth Symposium on ULSI Process Integration held in Washington, DC at the 212th Meeting of the Electrochemical Society, October 7-12, 2007"--P. iii.
"Dielectric and semiconductor materials, devices, and processing"--Cover.
Sponsoring Division: Electronics and Photonics.
Includes bibliographical references and index.

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