Screen LibraryModeling aspects in optical metrology VIII : 21-25 June 2021, online only, Germany /
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| Corporate Authors: | ; |
|---|---|
| Group Author: | ; |
| Published: |
SPIE,
|
| Publisher Address: | Bellingham, Washington : |
| Publication Dates: | [2021] |
| Literature type: | Book |
| Language: | English |
| Series: |
Proceedings of SPIE,
volume 11783 |
| Subjects: | |
| Item Description: | "At SPIE Optical Metrology" -- Cover. |
| Carrier Form: | 1 volume (various pagings) : illustrations, forms ; 27 cm. |
| Bibliography: | Includes bibliographical references. |
| ISBN: | 9781510644007 (paperback) : |
| CLC: |
TN4-532 O432.2-532 |
| Call Number: | O432.2-532/M689/2021 |