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MEMS cost analysis : from laboratory to industry /

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Bibliographic Details
Main Authors: Lawes, Ronald A
Published: Pan Stanford Publishing,
Publisher Address: Singapore :
Publication Dates: [2014]
Literature type: Book
Language: English
Subjects:
Microelectromechanical systems > Design and construction > Costs
Microelectromechanical systems industry > Costs
Carrier Form: xvi, 289 pages : illustrations ; 24 cm
Bibliography: Includes bibliographical references and index.
ISBN: 9789814411066 :
981441106X
Index Number: TK7875
CLC: TM38
Call Number: TM38/L417
Contents: 1. The world of MEMS -- 2. Basic fabrication processes -- 3. Surface micromachining -- 4. High-aspect-ratio micromachining -- 5. MEMS testing -- 6. MEMS packaging -- 7. Clean rooms, buildings and plant -- 8. The MEMSCOST spreadsheet -- 9. Product costs : accelerometers -- 10. Product costs : microphones -- 11. MEMS foundries -- 12. Financial reporting and analysis -- 13. Conclusions.

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