MEMS, MOEMS, and micromachining II:3-4 April, 2006, Strasbourg, France

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Bibliographic Details
Corporate Authors: Bas-Rhin France. Conseil gaenaeral; Comitae national d'optique et de photonique France; Society of Photo-Optical Instrumentation Engineers; SPIE Europe
Group Author: El-Fatatry Ayman; Urey Hakan 1970-
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2006.
Literature type: Book
Language: English
Series: Proceedings of SPIE ; v. 6186
Subjects:
Carrier Form: 1 v. (various pagings): ill. ; 28 cm.
ISBN: 081946242X
Index Number: TN403
CLC: TN403-532
TH-39
TN203-532
Call Number: TN203-532/M626/2006
Contents: Includes bibliographical references and author index.