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Characterization and metrology for ULSI technology：2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March, 2003

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Bibliographic Details
Corporate Authors: International Conference on Characterization and Metrology for ULSI Technology (2003 Austin, Tex; National Institute of Standards and Technology U.S
Group Author: Seiler David G
Published: American Institute of Physics,
Publisher Address: Melville, N.Y.
Publication Dates: 2003.
Literature type: Book
Language: English
Series: AIP conference proceedings ; v. 683
Subjects:
Integrated circuits > Ultra large scale integration
Carrier Form: xviii, 818 p.: ill. ; 28 cm. +1 CD-ROM (4 3/4 in.)
ISBN: 0735401527
Index Number: N47
CLC: N47-532
Call Number: N47-532/C469/2003
Contents: Includes bibliographical references and index.

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