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Functional integration of opto-electro-mechanical devices and systems II：23-24 January 2002, San Jose, USA

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Bibliographic Details
Corporate Authors: Society of Photo-Optical Instrumentation Engineers
Group Author: Rantala Juha; Descour Michael R
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c2002.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 4647
Subjects:
Optoelectronic devices
Microelectronic packaging
Microelectromechanical systems
Carrier Form: v, 104 p.: ill. ; 28 cm.
ISBN: 0819443867
Index Number: TN203
CLC: TN203-532
TH-39
Call Number: TN203-532/F979/2002
Contents: Includes bibliographical references and index.

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