Screen LibraryPhotomask technology 2009：14-17 September 2009, Monterey, California, United States
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| Corporate Authors: | ; |
|---|---|
| Group Author: | ; |
| Published: |
SPIE,
|
| Publisher Address: | Bellingham, Wash. |
| Publication Dates: | c2009. |
| Literature type: | Book |
| Language: | English |
| Series: |
Proceedings of SPIE ; v. 7488 |
| Subjects: | |
| Carrier Form: | 2 v.: ill. ; 28 cm. |
| ISBN: |
9780819477958 0819477958 |
| Index Number: | TN305 |
| CLC: | TN305.7-532 |
| Call Number: | TN305.7-532/S989/2009 |
| Contents: |
Some earlier conferences have the title: Symposium on Photomask Technology, or the title: Annual BACUS Symposium on Photomask Technology, or the title: BACUS Symposium on Photomask Technology. Includes bibliographical references and index. |