Photomask technology 2009:14-17 September 2009, Monterey, California, United States
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Corporate Authors: | ; |
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Group Author: | ; |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | c2009. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE ; v. 7488 |
Subjects: | |
Carrier Form: | 2 v.: ill. ; 28 cm. |
ISBN: |
9780819477958 0819477958 |
Index Number: | TN305 |
CLC: | TN305.7-532 |
Call Number: | TN305.7-532/S989/2009 |
Contents: |
Some earlier conferences have the title: Symposium on Photomask Technology, or the title: Annual BACUS Symposium on Photomask Technology, or the title: BACUS Symposium on Photomask Technology. Includes bibliographical references and index. |