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Microsystems engineering：metrology and inspection : 20-21 June 2001, Munich, Germany

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Bibliographic Details
Corporate Authors: Wissenschaftliche Gesellschaft Lasertechnik; Society of Photo-Optical Instrumentation Engineers; European Optical Society
Group Author: Jüptner Werner P. O; Kujawińska Małgorzata; Gorecki Christophe
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c2001.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 4400
Subjects:
Optical detectors > Industrial applications
Microelectronics
Microelectromechanical systems
Interferometry
Mensuration
Quality control > Optical methods
Carrier Form: v, 176 p.: ill. ; 28 cm.
ISBN: 0819440957
Index Number: TH174
CLC: TH174-532
TN4-532
TB4-532
TB133-532
Call Number: TB4-532/M626/2001
Contents: Includes bibliographical references and index.

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