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Atomic layer deposition : principles, characteristics, and nanotechnology applications /

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Bibliographic Details
Main Authors: Kääriäinen, Tommi
Group Author: Cameron, David, 1949; Kääriäinen, Marja-Leena; Sherman, Arthur, 1931
Published: Scrivener Publishing, LLC ; Wiley,
Publisher Address: Salem, Massachusetts : Hoboken, New Jersey :
Publication Dates: [2013]
Literature type: eBook
Language: English
Edition: 2nd Edition.
Subjects:
Chemical vapor deposition
Epitaxy
Microelectronics
Nanotechnology
SCIENCE / Nanoscience
TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS
Nanotechnologie
Atomlagenabscheidung
Electronic books
Online Access: http://onlinelibrary.wiley.com/book/10.1002/9781118747407
Carrier Form: 1 online resource.
Bibliography: Includes bibliographical references and index.
ISBN: 9781118747384 (epub)
1118747380 (epub)
9781118747421 (pdf)
1118747429 (pdf)
9781118747346 ( mobi)
1118747348 ( mobi)
9781118747407 (electronic bk.)
1118747402 (electronic bk.)
9781299619128 (MyiLibrary)
1299619126 (MyiLibrary)
Index Number: TS695
CLC: O641

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