Screen LibraryHandbook of silicon wafer cleaning technology
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| Group Author: | ; |
|---|---|
| Published: |
William Andrew,
|
| Publisher Address: | Norwich, NY |
| Publication Dates: | c2008. |
| Literature type: | Book |
| Language: | English |
| Edition: | 2nd ed. |
| Series: |
Materials science & process technology series |
| Subjects: | |
| Carrier Form: | xxvi, 718 p.: ill. ; 24 cm. |
| ISBN: |
9780815515548 0815515545 |
| Index Number: | TN304 |
| CLC: | TN304.1 |
| Call Number: | TN304.1/H236/2nd.ed. |
| Contents: | Includes bibliographical references and index. |