Handbook of silicon wafer cleaning technology
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Group Author: | ; |
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Published: |
William Andrew,
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Publisher Address: | Norwich, NY |
Publication Dates: | c2008. |
Literature type: | Book |
Language: | English |
Edition: | 2nd ed. |
Series: |
Materials science & process technology series |
Subjects: | |
Carrier Form: | xxvi, 718 p.: ill. ; 24 cm. |
ISBN: |
9780815515548 0815515545 |
Index Number: | TN304 |
CLC: | TN304.1 |
Call Number: | TN304.1/H236/2nd.ed. |
Contents: | Includes bibliographical references and index. |