Modern optical characterization techniques for semiconductors and semiconductor devices
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Corporate Authors: | ; |
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Group Author: | ; ; |
Published: |
SPIE--the International Society for Optical Engineering,
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Publisher Address: | Bellingham, Wash., USA |
Publication Dates: | c1987. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE--the International Society for Optical Engineering ; v. 794 |
Subjects: | |
Carrier Form: | vi, 282 p.: ill. ; 28 cm. |
ISBN: | 089252829X (pbk.) |
Index Number: | TN3 |
CLC: | TN3-532 |
Call Number: | TN3-53/M689/1987/ |
Contents: |
"26-27 March 1987, Bay Point, Florida." Includes bibliographies and index. |