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Modern optical characterization techniques for semiconductors and semiconductor devices

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Bibliographic Details
Corporate Authors: Society of Photo-Optical Instrumentation Engineers; Metallurgical Society U.S
Group Author: Glembocki O. J; Pollak Fred H; Song J. J
Published: SPIE--the International Society for Optical Engineering,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c1987.
Literature type: Book
Language: English
Series: Proceedings of SPIE--the International Society for Optical Engineering ; v. 794
Subjects:
Thin film devices > Congresses
Thin films > Optical properties > Congresses
Carrier Form: vi, 282 p.: ill. ; 28 cm.
ISBN: 089252829X (pbk.)
Index Number: TN3
CLC: TN3-532
Call Number: TN3-53/M689/1987/
Contents: "26-27 March 1987, Bay Point, Florida."
Includes bibliographies and index.

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