Screen LibraryIntelligent modeling, diagnosis and control of manufacturing processes /
This volume demonstrates that the key to the modeling, diagnosis and control of the next generation manufacturing processes is to integrate knowledge-based systems with traditional techniques. An up-to-date study is given here of this relatively recent development. The book is for those working prim...
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| Corporate Authors: | |
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| Group Author: | ; |
| Published: |
World Scientific Pub. Co.,
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| Publisher Address: | Singapore ; River Edge, N.J. : |
| Publication Dates: | 1992. |
| Literature type: | eBook |
| Language: | English |
| Series: |
World Scientific series in automation ;
v. 4 |
| Subjects: | |
| Online Access: |
http://www.worldscientific.com/worldscibooks/10.1142/1530#t=toc |
| Summary: |
This volume demonstrates that the key to the modeling, diagnosis and control of the next generation manufacturing processes is to integrate knowledge-based systems with traditional techniques. An up-to-date study is given here of this relatively recent development. The book is for those working primarily with traditional techniques and those working in the knowledge-based systems field. Both sets of readers will find it to be a source of many specific ideas about the integration of knowledge-based systems with traditional techniques, and carrying a wealth of useful references. |
| Carrier Form: | 1 online resource (viii,263pages) : illustrations. |
| Bibliography: | Includes bibliographical references. |
| ISBN: | 9789814503570 |
| Index Number: | TS183 |
| CLC: | TH16 |
| Contents: | 1. Manufacturing diagnosis and control: a task-specific approach / W.F. Punch III, A.K. Goel and J. Sticklen -- 2. The theory and application of diagnostic and control expert system based on plant model / J. Suzuki and M. Iwamasa -- 3. Integrated problem solving for the diagnosis of interacting process malfunctions / J.K. McDowell and J.F. Davis -- 4. A neural network model for diagnostic problem solving / Y. Peng and J.A. Reggia -- 5. Process control system for VLSI fabrication / E. Sachs ... [et al.] -- 6. Development and application of equipment-specific process models for semiconductor manufacturing / K.-K. Lin and C. Spanos -- 7. Continuous equipment diagnosis using evidence integration - an LPCVD application / N.H. Chang, and C. Spanos -- 8. Equipment/instrument diagnosis with continuous and discrete causal relationships / B.-T.B. Chu -- 9. Intelligent control of semiconductor manufacturing processes / S.-S. Chen -- 10. A machine learning approach to diagnosis and control with applications in semiconductor manufacturing / K.B. Irani ... [et al.]. |