Metrology, inspection, and process control for microlithography XII:23-25 February 1998, Santa Clara, California
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Corporate Authors: | ; ; |
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Group Author: | |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash., USA |
Publication Dates: | c1998. |
Literature type: | Book |
Language: | English |
Series: |
SPIE proceedings series ; v. 3332 |
Subjects: | |
Carrier Form: | xv, 744 p.: ill. ; 28 cm. |
ISBN: | 0819427772 |
Index Number: | TN405 |
CLC: | TN405.7-532 |
Call Number: | TN405.7-532/M594/1998/ |
Contents: | Includes bibliographical references and index. |