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Simulation and design of microsystems and microstructures

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Bibliographic Details
Corporate Authors: International Conference on Simulation and Design of Microsystems and Microstructures 1995 Southampton, England)
Group Author: Lahrmann A.; Lessmöllmann C.; Adey R. A.
Published: Computational Mechanics Publications,
Publisher Address: Southampton
Publication Dates: c1995.
Literature type: Book
Language: English
Subjects:
Microelectronics > Simulation methods > Congresses.
Masks (Electonics) > Congresses.
Micromechanics > Congresses.
Computer-aided design > Congresses.
Microelectronics > Design > Congresses.
Carrier Form: 337 p.: ill. ; 24 cm.
ISBN: 1853123900 (Southampton)
1562523147 (Boston)
Index Number: TP202
CLC: TP202-532
TN402-532
TP203-532
Call Number: TP203-532/S614/1995/
Contents: "First International Conference on Simulation and Design of Microsystems and Microstructures, MicroSIM 95."
Conference held in Southampton, UK, Sept. 1995.
Includes bibliographical references and index.

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