Screen LibraryHandbook of semiconductor manufacturing technology
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| Group Author: | ; |
|---|---|
| Published: |
Marcel Dekker,
|
| Publisher Address: | New York |
| Publication Dates: | c2000. |
| Literature type: | Book |
| Language: | English |
| Subjects: | |
| Carrier Form: | xiv, 1157 p.: ill. ; 29 cm. |
| ISBN: | 0824787838 (alk. paper) |
| Index Number: | TN304 |
| CLC: |
TN304.05-62 TN305-62 |
| Call Number: | TN305-62/H236 |
| Contents: | Includes bibliographical references and index. |