Ion implantation of semiconductors
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Main Authors: | |
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Group Author: | ; |
Published: |
Edward Arnold,
|
Publisher Address: | London |
Publication Dates: | 1976. |
Literature type: | Book |
Language: | English |
Series: |
Contemporary electrical engineering |
Subjects: | |
Carrier Form: | viii, 214 p.: ill. ; 24 cm. |
ISBN: |
0713133589 0713133651 |
Index Number: | TN305 |
CLC: | TN305.3 |
Call Number: | TN305.3/C323/ |
Contents: | Includes bibliographical references and index. |