Screen LibraryDefects and diffusion in silicon processing：symposium held April 1-4, 1997, San Francisco, California, U.S.A.
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| Group Author: | |
|---|---|
| Published: |
Materials Research Society,
|
| Publisher Address: | Pittsburg, Pa. |
| Publication Dates: | c1997. |
| Literature type: | Book |
| Language: | English |
| Series: |
Materials Research Society symposium proceedings ; v. 469 |
| Subjects: | |
| Carrier Form: | xv, 541 p.: ill. ; 24 cm. |
| ISBN: | 1558993738 |
| Index Number: | TN305 |
| CLC: |
TN305-532 O474-532 TN304.1-532 |
| Call Number: | TN304.1-532/D313/1997/ |
| Contents: | Includes bibliographical references and index. |