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Micromachining technology for micro-optics：20 September 2000, Santa Clara, USA

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Bibliographic Details
Corporate Authors: Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.; Society of Photo-Optical Instrumentation Engineers
Group Author: (Sing H.), 1939-; Johnson Eric Gunner, 1936-; Lee S. H.
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c2000.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 4179
Subjects:
Optoelectronic devices > Industrial applications
Miniature electronic equipment > Industrial applications
Microelectromechanical systems
Integrated optics
Carrier Form: v, 180 p.: ill. ; 28 cm.
ISBN: 0819438359
Index Number: TN203
CLC: TN203-532
TN25-532
TN305-532
Call Number: TN25-532/M626-4/2000
Contents: Includes bibliographical references and index.

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