Cleaning technology in semiconductor device manufacturing ix:proceedings of the International Symposium
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Corporate Authors: | ; ; ; |
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Group Author: | |
Published: |
Electrochemical Society,
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Publisher Address: | Pennington, N.J. |
Publication Dates: | c2005. |
Literature type: | Book |
Language: | English |
Series: |
ECS transactions ; v. 1 no. 3 |
Subjects: | |
Carrier Form: | xi, 379 p.: ill. ; 24 cm. |
ISBN: |
1566774292 9781566774291 |
Index Number: | TN303 |
CLC: |
TN303-532 TN305.97-532 |
Call Number: | TN305.97-532/I61/2005 |
Contents: |
"The Ninth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing was held during the Fall Meeting of the Electrochemical Society in Los Angeles, California in October 2005"--Preface. Includes bibliographical references and indexes. |