Cover is for reference only

Cleaning technology in semiconductor device manufacturing ix：proceedings of the International Symposium

Saved in:
Bibliographic Details
Corporate Authors: Electrochemical Society. Dielectric Science and Technology Division; Electrochemical Society. Meeting (2005 Los Angeles, Calif.); International Symposium on Cleaning Technology in Semiconductor Device Manufacturing 2005 Los Angeles, Calif..); Electrochemical Society. Electronics and Photonics Division
Group Author: Rużyłło Jerzy
Published: Electrochemical Society,
Publisher Address: Pennington, N.J.
Publication Dates: c2005.
Literature type: Book
Language: English
Series: ECS transactions ; v. 1 no. 3
Subjects:
Semiconductor wafers > Cleaning
Carrier Form: xi, 379 p.: ill. ; 24 cm.
ISBN: 1566774292
9781566774291
Index Number: TN303
CLC: TN303-532
TN305.97-532
Call Number: TN305.97-532/I61/2005
Contents: "The Ninth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing was held during the Fall Meeting of the Electrochemical Society in Los Angeles, California in October 2005"--Preface.
Includes bibliographical references and indexes.

Related Book Recommendations