Micro- and nanoscale systems : novel materials, structures and devices : symposium held December 1-6, 2013, Boston, Massachusetts, U.S.A. /

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Bibliographic Details
Corporate Authors: Symposium XX, "Microelectromechanical Systems--Materials and Devices" Boston, Mass; Materials Research Society; Symposium SS, "Nanowires and Nanotubes--Novel Materials, Advanced Heterostructures, Doping and Devices" Boston, Mass
Group Author: Boeckl, John J (Editor)
Published: Materials Research Society ; Cambridge University Press,
Publisher Address: Warrendale, Pennsylvania : Cambridge :
Publication Dates: 2014.
Literature type: Book
Language: English
Series: Materials Research Society symposia proceedings ; v. 1659
Subjects:
Item Description: Previous conference proceedings entitled: MEMS, bioMEMS and bioelectronics--materials and devices.
"Symposium XX , "Microelectromechanical Systems -- Materials and Devices," held from December 2 to December 4, 2013 at the MRS Fall Meeting"--Preface.
"Symposium SS, "Nanowires and Nanotubes -- Novel Materials, Advanced Heterostructures, Doping and Devices," was held from December 1 to December 6, 2013 at the MRS Fall Meeting"--Preface.
"This volume represents the sixth installment in a series of proceedings ... ; the first five volumes were published as Volumes 1052, 1139, 1222, 1299, and 1415"--Preface.
Carrier Form: x, 235 pages : illustrations ; 24 cm.
Bibliography: Includes bibliographical references and indexes.
ISBN: 9781605116365 (hardback) :
160511636X (hardback)
Index Number: TK7875
CLC: TH-39
Call Number: TH-39/S989-1/2013