Screen LibraryHandbook of VLSI microlithography：principles, technology, and applications
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| Group Author: | ; |
|---|---|
| Published: |
Noyes Publications,
|
| Publisher Address: | Park Ridge, N.J., U.S.A. |
| Publication Dates: | c1991. |
| Literature type: | Book |
| Language: | English |
| Series: |
Materials science and process technology series |
| Subjects: | |
| Carrier Form: | xxii, 649 p.: ill. ; 25 cm. |
| ISBN: | 0815512813 |
| Index Number: | TN47 |
| CLC: | TN47-62 |
| Contents: | Includes bibliographical references and index. |