MEMS reliability

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Bibliographic Details
Main Authors: Hartzell Allyson L.
Corporate Authors: SpringerLink (Online service)
Group Author: Shea Herbert R.; Senturia Stephen D., 1940-; Da Silva Mark G.
Published: Springer,
Publisher Address: New York
Publication Dates: 2011.
Literature type: Book
Language: English
Series: MEMS reference shelf
Online Access: http://dx.doi.org/10.1007/978-1-4419-6018-4
Carrier Form: 1 online resource (xiii, 291 p.): ill. (some col.)
ISBN: 9781441960184 (electronic bk.)
144196018X (electronic bk.)
Index Number: TN406
CLC: TN406
Contents: Includes bibliographical references and index.