MEMS reliability
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Main Authors: | |
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Corporate Authors: | |
Group Author: | ; ; |
Published: |
Springer,
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Publisher Address: | New York |
Publication Dates: | 2011. |
Literature type: | Book |
Language: | English |
Series: |
MEMS reference shelf |
Online Access: |
http://dx.doi.org/10.1007/978-1-4419-6018-4 |
Carrier Form: | 1 online resource (xiii, 291 p.): ill. (some col.) |
ISBN: |
9781441960184 (electronic bk.) 144196018X (electronic bk.) |
Index Number: | TN406 |
CLC: | TN406 |
Contents: | Includes bibliographical references and index. |