Screen LibraryHandbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS /
This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, d...
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| Corporate Authors: | |
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| Group Author: | ; ; ; |
| Published: |
William Andrew,
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| Publisher Address: | Waltham, MA : |
| Publication Dates: | 2012. |
| Literature type: | eBook |
| Language: | English |
| Edition: | Second edition. |
| Subjects: | |
| Online Access: |
http://www.sciencedirect.com/science/book/9781437734836 |
| Summary: |
This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functiona |
| Item Description: | Title from publisher's Web site; (ScienceDirect; viewed on Oct. 25, 2012). |
| Carrier Form: | 1 online resource (644 pages) : color illustrations |
| Bibliography: | Includes bibliographical references and index. |
| Index Number: | TS695 |
| CLC: | TQ153-62 |
| Contents: | pt. I. Fundamentals of sputtering -- pt. II. Theory and practice : sputtering deposition of functional thin films -- pt. III. Sputtering technology for nanomaterials and thin film MEMS. |