Electronics and structures for MEMS II:17-19 December, 2001, Adelaide, Australia
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Corporate Authors: | ; ; |
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Group Author: | |
Published: |
SPIE,
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Publisher Address: | Bellingham, Washington |
Publication Dates: | c2001. |
Literature type: | Book |
Language: | English |
Series: |
SPIE proceedings series ; v. 4591 |
Subjects: | |
Carrier Form: | ix, 392 p.: ill. ; 28 cm. |
ISBN: | 0819443212 |
Index Number: | TH |
CLC: |
TH-39 TN403-532 TM38-532 |
Call Number: | TM38-532/E38/2001 |
Contents: | Includes bibliographic references and author index. |