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Electronics and structures for MEMS II：17-19 December, 2001, Adelaide, Australia

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Bibliographic Details
Corporate Authors: United States. Air Force. Asian Office of Aerospace Research and Development; Institute of Electrical and Electronics Engineers. South Australia Section; Society of Photo-Optical Instrumentation Engineers
Group Author: Bergmann Neil W
Published: SPIE,
Publisher Address: Bellingham, Washington
Publication Dates: c2001.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 4591
Subjects:
Smart structures
Microelectronics
Microelectromechanical systems
Carrier Form: ix, 392 p.: ill. ; 28 cm.
ISBN: 0819443212
Index Number: TH
CLC: TH-39
TN403-532
TM38-532
Call Number: TM38-532/E38/2001
Contents: Includes bibliographic references and author index.

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