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Emerging semiconductor technology：a symposium

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Bibliographic Details
Corporate Authors: Symposium on Semiconductor Processing 1986 San Jose, Calif.) (San Jose, Calif.)); ASTM Committee F-1 on Electronics.
Group Author: (Dinesh C.); Langer Paul H.; Gupta D. C.
Published: American Society for Testing and Materials,
Publisher Address: Philadelphia, PA
Publication Dates: c1987.
Literature type: Book
Language: English
Series: ASTM special technical publication ; 960
Subjects:
Semiconductors > Congresses. > Congresses.
Semiconductor industry > Congresses.
Carrier Form: 704 p.: ill. ; 24 cm.
ISBN: 0803104596
Index Number: TN3
CLC: TN3-532
Call Number: TN3-53/E53/1986/
Contents: Papers presented at the Fourth International Symposium on Semiconductor Processing.
"ASTM publication code number (PCN) 04-960000-46."
Includes bibliographies and indexes.

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