Emerging semiconductor technology:a symposium
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Corporate Authors: | ; |
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Group Author: | ; ; |
Published: |
American Society for Testing and Materials,
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Publisher Address: | Philadelphia, PA |
Publication Dates: | c1987. |
Literature type: | Book |
Language: | English |
Series: |
ASTM special technical publication ; 960 |
Subjects: | |
Carrier Form: | 704 p.: ill. ; 24 cm. |
ISBN: | 0803104596 |
Index Number: | TN3 |
CLC: | TN3-532 |
Call Number: | TN3-53/E53/1986/ |
Contents: |
Papers presented at the Fourth International Symposium on Semiconductor Processing. "ASTM publication code number (PCN) 04-960000-46." Includes bibliographies and indexes. |