Advances in patterning materials and processes XXXVIII : 22-26 February 2021, Online Only, United States /
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Corporate Authors: | ; |
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Group Author: | ; |
Published: |
SPIE,
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Publisher Address: | Bellingham, Washington : |
Publication Dates: | [2021] |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE,
volume 11612 |
Subjects: | |
Item Description: | "At SPIE Advanced Lithography" -- Cover. |
Carrier Form: | 1 volume (various pagings) : illustrations, forms ; 28 cm. |
Bibliography: | Includes bibliographical references. |
ISBN: | 9781510640573 (paperback) : |
CLC: | TS82-532 |
Call Number: | TS82-532/A244/2021 |