Elements of electromigration : electromigration in 3D IC technology /

In this invaluable resource for graduate students and practicing professionals, Tu and Liu provide a comprehensive account of electromigration and give a practical guide on how to manage its effects in microelectronic devices, especially newer devices that make use of 3D architectures. In the era of...

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Bibliographic Details
Main Authors: Tu, K. N. (King-Ning), 1937- (Author)
Group Author: Liu, Yingxia
Published: CRC Press, Taylor & Francis Group,
Publisher Address: Boca Raton, FL :
Publication Dates: 2024.
Literature type: Book
Language: English
Edition: First edition.
Subjects:
Summary: In this invaluable resource for graduate students and practicing professionals, Tu and Liu provide a comprehensive account of electromigration and give a practical guide on how to manage its effects in microelectronic devices, especially newer devices that make use of 3D architectures. In the era of big data and artificial intelligence, next-generation microelectronic devices for consumers must be smaller, consume less power, cost less, and, most importantly, have higher functionality and reliability than ever before. However, with miniaturization, the average current density increases, and so does the probability of electromigration failure. This book covers all critical elements of electromigration, including basic theory, various failure modes induced by electromigration, methods to prevent failure, and equations for predicting mean-time-to-failure. Furthermore, effects such as stress, Joule heating, current crowding, and oxidation on electromigration are covered, and the new and modified mean-time-to-failure equations based on low entropy production are given. Readers will be able to apply this information to the design and application of microelectronic devices to minimize the risk of electromigration-induced failure in microelectronic devices. This book essential for anyone who wants to understand these critical elements and minimize their effects. It is particularly valuable for both graduate students of electrical engineering and materials science engineering and engineers working in the semiconductor and electronic packaging technology industries.
Carrier Form: ix, 131 pages : illustrations ; 25 cm
Bibliography: Includes bibliographical references and index.
ISBN: 9781032470276
1032470275
9781032470283
1032470283
Index Number: TN690
CLC: TG113.22
Call Number: TG113.22/T883
Contents: 1. Introduction 2. Driving forces of electromigration 3. Kinetics of electromigration 4. Damage of electromigration 5. Irreversible processes 6. Effect of stress on electromigration 7. Effect of current crowding on electromigration 8. Effect of Joule heating on electromigration 9. Effect of Oxidation on Electromigration 10. Modified Mean-Time-to-Failure Equations