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Micro- and nanosystems--materials and devices：symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.

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Bibliographic Details
Corporate Authors: Symposium on Micro- and Nanosystems--Materials and Devices (2005 San Francisco, Calif.); Materials Research Society. Meeting (2005 San Francisco, Calif.)
Group Author: Ozkan Cengiz S
Published: Materials Research Society,
Publisher Address: Warrendale, Pa.
Publication Dates: c2005.
Literature type: Book
Language: English
Series: Materials Research Society symposium proceedings ; v. 872
Subjects:
Nanotechnology
Microelectromechanical systems
Carrier Form: xv, 525 p.: ill. ; 24 cm.
ISBN: 1558998268
Index Number: TH
CLC: TH-39
TN403-532
TN4-532
Call Number: TN4-532/M626/2005
Contents: "Symposium J, 'Micro- and Nanosystems--Materials and Devices' [was] held March-28-April 1 at the 2005 MRS Spring Meeting in San Francisco, California ..."--Pref.
Includes bibliographical references and indexes.

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