Micromachining and microfabrication process technology X:25-27 January 2005, San Jose, California, USA
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Corporate Authors: | ; ; ; |
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Group Author: | ; |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | c2005. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE ; v. 5715 |
Subjects: | |
Carrier Form: | vii, 200 p.: ill. ; 28 cm. |
ISBN: | 0819456896 |
Index Number: | TH11 |
CLC: |
TH11-532 TB4-532 |
Call Number: | TH11-532/M626.2/2005 |
Contents: | Includes bibliographical references and author index. |