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Literature type: Book

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Micromachining and microfabrication process technology X：25-27 January 2005, San Jose, California, USA

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Bibliographic Details
Corporate Authors: Semiconductor Equipment and Materials International; Solid State Technology Organization; Sandia National Laboratories; Society of Photo-Optical Instrumentation Engineers
Group Author: Stewart Harold D; Perez-Maher Mary Ann
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2005.
Literature type: Book
Language: English
Series: Proceedings of SPIE ; v. 5715
Subjects:
Microfabrication
Electromechanical devices > Design and construction
Micromachining
Carrier Form: vii, 200 p.: ill. ; 28 cm.
ISBN: 0819456896
Index Number: TH11
CLC: TH11-532
TB4-532
Call Number: TH11-532/M626.2/2005
Contents: Includes bibliographical references and author index.

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