Screen LibraryAmorphous silicon carbide thin films：deposition, characterization, etching, and piezoresistive sensors applications
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| Main Authors: | |
|---|---|
| Published: |
Nova Science Publishers,
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| Publisher Address: | New York |
| Publication Dates: | c2011. |
| Literature type: | Book |
| Language: | English |
| Series: |
Materials science and technologies |
| Subjects: | |
| Carrier Form: | xii, 106 p.: ill. ; 23 cm. |
| ISBN: |
9781613247747 (softcover) 1613247745 (softcover) |
| Index Number: | TN304 |
| CLC: | TN304.2 |
| Call Number: | TN304.2/F811 |
| Contents: | Includes bibliographical references and index. |