Amorphous silicon carbide thin films:deposition, characterization, etching, and piezoresistive sensors applications
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Main Authors: | |
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Published: |
Nova Science Publishers,
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Publisher Address: | New York |
Publication Dates: | c2011. |
Literature type: | Book |
Language: | English |
Series: |
Materials science and technologies |
Subjects: | |
Carrier Form: | xii, 106 p.: ill. ; 23 cm. |
ISBN: |
9781613247747 (softcover) 1613247745 (softcover) |
Index Number: | TN304 |
CLC: | TN304.2 |
Call Number: | TN304.2/F811 |
Contents: | Includes bibliographical references and index. |