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The 14th IEEE International Conference on Micro Electro Mechanical Systems：MEMS 2001 : Interlaken, Switzerland, January 21-25, 2001

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Bibliographic Details
Corporate Authors: IEEE International Conference on Micro Electro Mechanical Systems (14th 2001 Interlaken, Switzerland; IEEE Robotics and Automation Society
Published: Institute of Electrical and Electronics Engineers,
Publisher Address: Piscataway N.J.
Publication Dates: c2001.
Literature type: Book
Language: English
Subjects:
Microelectromechanical systems
Carrier Form: xxxviii, 610 p.: ill. ; 28 cm.
ISBN: 0780359984
0780359992 (casebound)
0780362500 (microfiche)
Index Number: TM38
CLC: TM38-532
Call Number: TM38-532/I61/2001
Contents: "IEEE Catalog Number: 01CH37090"--T.p. verso.
Ahead of title : "Technical Digest".
Includes bibliographical references.

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