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Laser-based micro- and nanoprocessing XV : 6-11 March 2021, Online Only, United States /

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Bibliographic Details
Corporate Authors: Laser-based Micro- and Nanoprocessing (Conference) Online Only, United States); SPIE (Society)
Group Author: Klotzbach, Udo; Watanabe, Akira; Kling, Rainer
Published: SPIE,
Publisher Address: Bellingham, Washington :
Publication Dates: [2021]
Literature type: Book
Language: English
Series: Proceedings of SPIE, volume 11674
Subjects:
Electronic packaging > Congresses.
Lasers > Industrial applications > Congresses.
Micromachining > Congresses.
Micromechanics > Congresses.
Item Description: "At SPIE LASE" -- Cover.
Carrier Form: 1 volume (various pagings) : illustrations ; 28 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781510641839
CLC: TN249-532
Call Number: TN249-532/L343-8/2021

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