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Laser-assisted microtechnology

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Bibliographic Details
Main Authors: Metev Simeon M. (Simeon Metodiev)
Group Author: (Vadim Pavlovich); Veiko V. P.
Published: Springer-Verlag,
Publisher Address: Berlin
Publication Dates: c1994.
Literature type: Book
Language: English
Series: Springer series in materials science ; 19
Subjects:
Lasers > Industrial applications.
Manufacturing processes
Electronic circuit design.
Thin film devices > Design and construction.
Electronic industries > Technological innovations.
Carrier Form: x, 240 p.: ill. ; 25 cm.
ISBN: 3540539255 (Berlin : acid-free paper)
Index Number: TN249
CLC: TN249
Call Number: TN249/M589/
Contents: Includes bibliographical references (p. 221-238) and index.

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