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Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV：5-7 December 2007, Canberra, Australia

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Bibliographic Details
Corporate Authors: Australian National University; Australian National University. Research School of Physical Sciences; University of Adelaide. Centre for Biomedical Engineering; Society of Photo-Optical Instrumentation Engineers
Group Author: Tan Hark Hoe
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2008.
Literature type: Book
Language: English
Series: Proceedings of SPIE ; v. 6800
Subjects:
Photonics
Photomechanical processes
Photolithography
Nanotechnology
Microelectromechanical systems
Carrier Form: 1 v. (various pagings): ill. ; 28 cm.
ISBN: 9780819469717
0819469718
Index Number: TN4
CLC: TN4-532
TH-39
TM380.5-532
Call Number: TM380.5-532/D492/2007
Contents: Earlier conferences have title: Device and process technologies for MEMS, microelectronics, and photonics.
Includes bibliographical references and index.

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