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Laser-based micro- and nanoprocessing XIV : 3-6 February 2020, San Francisco, California, United States /

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Bibliographic Details
Corporate Authors: Laser-based Micro- and Nanoprocessing Conference San Francisco, California, United States; SPIE Society
Group Author: Klotzbach, Udo (Editor); Watanabe, Akira (Editor); Kling, Rainer (Editor)
Published: SPIE,
Publisher Address: Bellingham, Washington :
Publication Dates: [2020]
Literature type: Book
Language: English
Series: Proceedings of SPIE--the International Society for Optical Engineering ; volume 11268. 0277-786X
Subjects:
Electronic packaging > Congresses
Lasers > Industrial applications > Congresses
Micromachining > Congresses
Micromechanics > Congresses
Item Description: "At SPIE LASE"--Cover.
Carrier Form: 1 volume (various pagings) : illustrations, forms ; 28 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781510632998 (paperback) :
CLC: TN249-532
Call Number: TN249-532/L343-8/2020

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