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Smart sensors, actuators, and MEMS IV：4-6 May 2009, Dresden, Germany

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Bibliographic Details
Corporate Authors: SPIE Society; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik; SPIE Europe
Group Author: Cané Carles; Shea Herbert R; Schmid Ulrich, Prof
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2009.
Literature type: Book
Language: English
Series: Proceedings of SPIE ; v. 7362
Subjects:
Microtechnology
Actuators > Industrial applications
Detectors > Industrial applications
Scanning systems
Microelectromechanical systems
Carrier Form: 1 v. (various pagings): ill. ; 28 cm.)
ISBN: 9780819476364
0819476366
Index Number: TH
CLC: TH-39
TP212.6-532
TN4-532
Call Number: TP212.6-532/S636/2009

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