Reliability, packaging, testing, and characterization of moems/mems and nanodevices XII:4-5 February 2013, San Francisco, California, United States
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Corporate Authors: | |
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Group Author: | ; |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | [2013] |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE ; v. 8614 |
Subjects: | |
Carrier Form: | 1 v. (various pagings): ill. ; 28 cm. |
ISBN: |
081949383X (paperback) 9780819493835 (paperback) |
Index Number: | TN406 |
CLC: | TN406-532 |
Call Number: | TN406-532/R382/2013 |
Contents: |
"SPIE Photonics West" --cover. Includes bibliographical references and author index. |