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Reliability, packaging, testing, and characterization of moems/mems and nanodevices XII：4-5 February 2013, San Francisco, California, United States

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Bibliographic Details
Corporate Authors: SPIE Society
Group Author: Ramesham Rajeshuni (editor of compilation.); Shea Herbert R (editor of compilation.)
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: [2013]
Literature type: Book
Language: English
Series: Proceedings of SPIE ; v. 8614
Subjects:
Microelectromechanical systems > Reliability
Microelectromechanical systems > Testing
Microelectronic packaging
Carrier Form: 1 v. (various pagings): ill. ; 28 cm.
ISBN: 081949383X (paperback)
9780819493835 (paperback)
Index Number: TN406
CLC: TN406-532
Call Number: TN406-532/R382/2013
Contents: "SPIE Photonics West" --cover.
Includes bibliographical references and author index.

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