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Advances in metrology for x-ray and EUV optics III：1-2 August 2010, San Diego, California, United States

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Bibliographic Details
Corporate Authors: SPIE Society
Group Author: Takacs Peter Z; Asundi Anand; Assoufid Lahsen
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2010.
Literature type: Book
Language: English
Series: Proceedings of SPIE ; 7801.
Subjects:
Optical instruments > Design and construction
Measuring instruments > Design and construction
Laser interferometers
Measurement
Optical measurements
Carrier Form: 1 v. (various pagings): ill. ; 28 cm.
ISBN: 9780819482976
0819482978
Index Number: TB96
CLC: TB96-532
O439-532
Call Number: TB96-532/A244-1/2010
Contents: Includes bibliographical references and index.

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