Screen LibraryScanning Auger electron microscopy
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| Corporate Authors: | |
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| Group Author: | ; |
| Published: |
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| Literature type: | Electronic eBook |
| Language: | English |
| Subjects: | |
| Online Access: |
http://onlinelibrary.wiley.com/book/10.1002/9780470866795 |
| Carrier Form: | 1 online resource (xvii, 368 pages) : illustrations (some color) |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: |
9780470866795 0470866799 0470866780 9780470866788 0470866772 9780470866771 |
| Index Number: | QH212 |
| CLC: | TN16 |
| Contents: | Introduction / M.M. El Gomati and M. Prutton -- The Auger process / J.A.D. Matthew -- Instrumentation / M.M. El gomati and M. Prutton -- The spatial resolution / M.M. El Gomati -- Forming an Auger image / M.M. El Gomati and M. Prutton -- Image processing and interpretation / M. Prutton -- Quantification of Auger images / M. Prutton -- Applications: materials science / R.K. Wild -- Applications: semiconductor manufacturing / C.F.H. Gondran -- Concluding remarks / M.M. El Gomati and M. Prutton. |