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Proceedings of the Third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

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Bibliographic Details
Corporate Authors: Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (3rd 1994 San Francisco, Calif; Electrochemical Society. Dielectric Science and Technology Division; Electrochemical Society. Electronics Division
Group Author: Kapoor Vikram J; Brown William D
Published: Electrochemical Society,
Publisher Address: Pennington, NJ
Publication Dates: c1994.
Literature type: Book
Language: English
Series: Proceedings / Electrochemical Society ; v. 94-16
Subjects:
Silicon dioxide > Congresses
Electric insulators and insulation > Thin films > Congresses
Thin film devices > Congresses
Silicon nitride > Congresses
Carrier Form: xiii, 625 p.: ill. ; 24 cm.
ISBN: 1566770483
Index Number: TM215
CLC: TM215.3-532
Call Number: TM215.3-532/S989/1994/
Contents: The symposium was held May 23-27, 1994 in San Francisco, California.
Includes bibliographies and indexes.

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