Proceedings of the Third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
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Corporate Authors: | ; ; |
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Group Author: | ; |
Published: |
Electrochemical Society,
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Publisher Address: | Pennington, NJ |
Publication Dates: | c1994. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings / Electrochemical Society ; v. 94-16 |
Subjects: | |
Carrier Form: | xiii, 625 p.: ill. ; 24 cm. |
ISBN: | 1566770483 |
Index Number: | TM215 |
CLC: | TM215.3-532 |
Call Number: | TM215.3-532/S989/1994/ |
Contents: |
The symposium was held May 23-27, 1994 in San Francisco, California. Includes bibliographies and indexes. |