Radio-frequency capacitive discharges

Saved in:
Bibliographic Details
Main Authors: Raizer Yuri P
Group Author: Shneider Mikhail N; Yatsenko Nikolai A
Published: CRC Press,
Publisher Address: Boca Raton
Publication Dates: c1995.
Literature type: Book
Language: English
Subjects:
Carrier Form: xii, 292 p.: ill. ; 24 cm.
ISBN: 0849386446 (acid-free paper)
Index Number: TN751
CLC: TN751.3
TM53
Call Number: TM53/R161/
Contents: Translation from Russian.
Includes bibliographical references (p. 271-289) and index.