Radio-frequency capacitive discharges
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Main Authors: | |
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Group Author: | ; |
Published: |
CRC Press,
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Publisher Address: | Boca Raton |
Publication Dates: | c1995. |
Literature type: | Book |
Language: | English |
Subjects: | |
Carrier Form: | xii, 292 p.: ill. ; 24 cm. |
ISBN: | 0849386446 (acid-free paper) |
Index Number: | TN751 |
CLC: |
TN751.3 TM53 |
Call Number: | TM53/R161/ |
Contents: |
Translation from Russian. Includes bibliographical references (p. 271-289) and index. |